冯飞
With the development of MEMS(Miro-electro-mechanical system) technology, the breakthrough of uncooled thermal imaging technology has been achieved in recent years. Optical readable uncooied thermal imaging technology is one of the most attractive topics in infrared detective field. In this dissertation, we first proposed a novel micromachined optical readable uncooled thermal imaging system based on Fabry-Perot interferential principle, which has many merits, for example, higher brightness, bett